Wenbing Yun
Xradia
Abstract:
X-ray computed tomography (XCT) offers powerful non-destructive three dimensional
imaging capability that is widely used in diverse fields, including medical diagnosis,
biomedical and material research, geology, petrology, and archeology.
This powerful imaging capability results from many intrinsic and desirable properties of x-rays:
short wavelength for high-resolution imaging, high penetration power for imaging interior
structures of large and optically opaque objects, and unique elemental specific interaction
for elemental specific imaging and spectroscopic imaging. Since its invention, the capabilities
of XCT have evolved rapidly in terms of high-resolution x-ray imaging optics and development
of phase contrast imaging. For example, the resolution of commercially available systems
has improved from about 1 mu to sub-50 nm. Xradia has developed 3D x-ray tomography
imaging systems with outstanding resolutions: sub-50 nm using a laboratory x-ray source and
sub-30 nm using a synchrotron x-ray source. The nanoXCT operates at x-ray energies range
from 3 to 20 keVs. Unlike projection x-ray imaging equipment, the resolution of the x-ray
microscope used for these measurements is determined by the imaging x-ray lens, not by the size
of the x-ray source. The lens is a circular diffraction grating configured as a simple
zone-plate, having a resolution of about 50 nm and a focusing efficiency above 10%.
The performance of Xradia's x-ray imaging systems will be presented and their applications discussed.
